Glossary
Residual Gas Analysis
Identifying the gases present in the vacuum.
A residual gas analyser (a small mass spectrometer) identifies the species in the vacuum, monitoring purity, leaks and wall conditions. It is a routine vacuum diagnostic.
Identifying the gases present in the vacuum.
A residual gas analyser (a small mass spectrometer) identifies the species in the vacuum, monitoring purity, leaks and wall conditions. It is a routine vacuum diagnostic.